题  目：Critical Surface Treatments and Coatings for Semiconductor Manufacturing Equipment

演讲人：Steve Lin, Ph.D
　　　　　 资深研究员，先后任职于著名的美国应用材料公司、台湾富士迈公司等

时  间：2012年7月26日下午14：00

地  点：工艺楼403室

欢迎职工和研究生参加！ 

 演讲提纲：

·Introduction

·Surface treatment and coatings for critical applications

· Unique requirements

· Critical treatments of Al alloys

　   oAnodization

　　 oElectroless Ni plating

　   oSelective Ni plating

· Critical treatment of SST alloys

　   oElectropolishing

· Conclusions

报告人简介：

Master and Ph.D. in Materials Science and Engineering from University of Texas at Austin (1989/1993)

• Extensive training and experience in surface science, surface engineering as well as surface and interface analysis
• Extensive experience in failure analysis of plating and coating
• Most researches projects related to fabricating processing of semiconductors, including Si and GaAs

Summary of Industrial Experience

• 20 year experience in semiconductor manufacturing equipment industries, familiar with all key types of equipment as well as respective processes, including etch, CVD, PVD, RTP, etc. 
• 15 year experience in developing and deploying technical specifications for micro-contamination control/reduction, cleaning/precision cleaning, anodization, specialty plating (high phosphorous electroless Ni plating, high reflectivity goal coating, etc., and specialized coatings
• More than 5 year experience in managing surface treatment operation to provide various services to semiconductor manufacturing equipment industries, including key equipment suppliers, such as Applied Materials, Lam Research, Novellus in US, as well their suppliers, AMEC, NMC in China.
  • UHV/Precision cleaning
  • Anodization of critical components for etch application
  • Electroless Ni plating and various Ni plating
  • Refurbishing of TFT/LCD critical components

1993 to 2005 - various positions (latest as Sr. Member of Technical Staff) in a number of organizations/functions, including manufacturing engineering, design engineering, operation project management and technology group in supply chain management at Applied Materials, Inc.

2005 to 2006 - Senior Director, Product Management, AMEC, Shanghai, 

2006 to 2010 - various positions (latest as VP/GM for China Operation) at Foxsemicon Integrated Technology Inc.