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12.20】韩国KIECT学者学术报告会
 
2018-12-17 | 文章来源:陶瓷及复合材料研究部        【 】【打印】【关闭

  报告人:Dr. Lee Sung-Min 

      Dr. Oh Yoon-suk 

      Korea Institute of Ceramic Engineering and Technology, KOREA 

  时间:20181220日(周四)10:00-12:00 

  地点:李薰楼468会议室

  报告1:Ceramics for Fluorine-based Plasma Environment: Erosion Mechanism and New Plasma Resistant Materials

Abstract:In semiconductor manufacturing equipment, the ceramics are exposed to fluorine- or chlorine-based plasma, experiencing erosion due to the interaction with the plasmas as well as producing particulate contaminations. Through high precision X-ray photoelectron spectroscopy, the surface of the ceramics was found to consist of a nanometer thin top C-F polymer layer and the underlying fluorinated oxide layer which is thermodynamically stable. Thus, this result support that erosion of Al2O3 and Y2O3 ceramics under fluorocarbon plasma occurs by a physical removal process with simultaneous surface fluorination which was induced by the interaction with plasma. In these regards, a new dense Y2O3 coating is being studied using several techniques, including physical vapor deposition, aerosol deposition, and suspension plasma spray (SPS). Of these, suspension plasma spray could possibly provide dense Y2O3, which could contribute to reducing contamination particles. In addition to oxides, a new oxyfluoride material with various F content are being developed.

  报告2:Ytterbium Silicate based EBC development by Suspension Plasma Spray

Abstract:SiC-based CMCs are attracting attention as hot section parts in airfoil engine at high-temperature operation environment. However, there is a disadvantage that the lifetime is shortened in a high temperature oxidizing and moisture atmosphere. To overcome this, an environmental shielding coating is being studied. In this study, we tried to fabricate an environmentally shielding coating using Yb2Si2O7 which is excellent in oxidation resistance and has similar thermal expansion coefficient with SiC by suspension plasma spray. In order to prepare a crystalline Yb2Si2O7 coating layer, the gas concentration of the plasma spray was adjusted and 2 types of solvent used for the suspension manufacturing with several mixing ratios. The prepared coating samples are analyzed by X-ray diffraction, scanning electron microscope, transmission electron microscopes, and energy dispersive X-ray spectroscopy for phase and microstructure change. Highly crystalline ytterbium disilicate is observed at low plasma enthalpy with no hydrogen gas and 20% addition of water in ethanol suspension.

 

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