(June 4-5, 2012)

Aim and Scope

MicroElectroMechanical System (MEMS)/Microsystem Technology (MST) devices have been applied in many fields including information, energy and bio-medical technologies, etc. Physical dimensions of components used in MEMS/MST devices are usually in a range from micron to nanometer scales, being comparable to microstructural scale of the material. Materials issues for these devices including micro-fabrication, characterization of microstructures/defects, and evaluation of mechanical properties of the materials are closely related to their performance, durability and reliability. The objective of this mini-workshop is to discuss and exchange ideas about the emerging issues relating application and preparation of small-scale materials for MEMS/MST devices, novel methods to characterize mechanical properties, understanding of size effects in the materials.

Venue

Seminar Hall (No. 468), Lee Hsun Building
　　Institute of Metal Research, Chinese Academy of Sciences
　　72 Wenhua Road, Shenyang 110016
　　P. R. China

Chair of the 4th IWMIMD

Prof. Guang-Ping Zhang

Shenyang National Laboratory for Materials Science
　　Institute of Metal Research
　　Chinese Academy of Sciences
　　E-mail: gpzhang@imr.ac.cn